Clean Room Vertical Carousels

Clean room vertical carousels from White Systems provide up to a 75% savings of floor space in ISO Class 3 to ISO Class 7 environments.

Since 1994 White has been building clean room carousels for major semiconductor manufacturers. Today there are over 60 units in operation worldwide. White’s clean room carousels conform to SEMI S2 and S8 Guidelines, and are ETL and CE certified.

Configuration

White’s clean room carousels can be configured to handle just about any storage application. Current configurations include 200mm and 300mm wafers in SMIF, FOUP, and FOSBY containers, and various forms of reticle storage. Built-in readers for IR and RF tags, and bar codes can be supplied that will communicate through the tool’s controller onto the facility’s network. SEMI E.15.1 manual load ports are available as well as custom solutions for robotic, monorail, PGV, or AGV interfaces.

White’s clean room carousels may be located inside a clean room, fully utilizing all vertical space from the HEPA grid ceiling to the raised floor base slab. Units can span multiple floor levels to serve as storage devices and vertical lifts. Pass-through units can be located adjacent to a clean room to act as gateways and storage buffers. Freestanding units can be set up as mini-environments.

Design

White’s clean room carousels take advantage of a facility’s HEPA filtration system for increased economy. Laminar airflow from the facility is directed through the unit to protect stored product from contamination. Special internal baffles isolate the carousel mechanism from the internal storage area – keeping product free of particulates. Pans and equipment surfaces are specially designed to reduce particulate formation. Multiple door units are automatically controlled to allow only one open door at a time and to close the door after the transaction is complete – eliminating accidental cross-zone contamination.

White Systems’ clean room carousels incorporate heavy-duty components in a robust design, achieving 99.91% reliability in high activity applications.

Applications

• Semiconductor manufacturers
• Electronics manufacturers
• Aerospace
• Pharmaceuticals
• Biotechnology
• Medical device manufacturers
• Clinical and pharmaceutical research

Clean Room Benefits

Clean Room Guidelines